Resistivity Standard (RS)

Resistivity Standards (RS) span 4 decades and are designed for resistance calibration of both contact and non-contact resistivity measuring instruments. The resistance calibration standard is created by sawing a doped single crystalline ingot into wafers, lapping and chemically cleaning them to VLSI Standards' specifications.

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Silica Contamination Standards (SCS)

RAISE YOUR GLASS. The Silica Contamination Standard (SCS) is used to calibrate high-intensity UV tools which size and detect silica particles on the surface of bare silicon wafers.

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Step Height Standards (Quartz)

Step Height Standards (SHS) are designed for the calibration of mechanical or optical surface profiler standards. These optical or mechanical profiler calibration standards consist of a 25 mm x 25 mm x 3 mm quartz block with a precisely etched uniform bar along with various test and diagnostic features.

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